Browsing by author "Totir, George"
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Post ion-implant photoresist removal via wet chemical cleans combined with physical force pretreatments
Totir, George; Frank, Martin M.; Vos, Rita; Arnauts, Sophia; Bearda, Twan; Kenis, Karine; Delande, Tinne; Le, Quoc Toan; Kesters, Els; Vereecke, Guy; Mannaert, Geert; Lux, Marcel; Hoflijk, Ilse; Conard, Thierry; Banerjee,; Malhouitre, Stephane; Leunissen, Peter; Mertens, Paul (2007)