Browsing by author "Monroe, D."

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Improved film growth and flatband voltage control of ALD HfO2 and Hf-Al-O with n+ poly-si gates using chemical oxides and optimized post-annealing

Wilk, G. D.; Green, Martin; M.-Y., Ho; Busch, B. W.; Sorsch, T. W.; Klemens, F. P.; Brijs, Bert; van Dover, R. B.; Kornblit, A.; Gustafsson, T.; Garfunkel, E.; Hillenius, S.; Monroe, D.; Kalavade, P.; Hergenrother, J. M. (2002)