Browsing by author "Harukawa, Ryota"

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Pathangi Sriraman, Hari; Chan, BT; Bayana, Hareen; Vandenbroeck, Nadia; Van Den Heuvel, Dieter; Van Look, Lieve; Rincon Delgadillo, Paulina; Cao, Yi; Kim, JiHoon; Lin, Guanyang; Parnell, Doni; Nafus, Kathleen; Harukawa, Ryota; Chikashi, Ito; Polli, Marco; D'Urzo, Lucia; Gronheid, Roel; Nealey, Paul (2015)

Defect source analysis of directed self-assembly process (DSA of DSA)

Rincon Delgadillo, Paulina; Harukawa, Ryota; Suri, Mayur; Durant, Stephane; Cross, Andrew; Nagaswami, Venkat; Van Den Heuvel, Dieter; Gronheid, Roel; Nealey, Paul (2013)

DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec

Pathangi Sriraman, Hari; Vaid, Varun; Chan, BT; Vandenbroeck, Nadia; Li, Jin; Hong, Sung Eun; Cao, Yi; Durairaj, Baskaran; Lin, Guanyang; Somervell, Mark; Kitano, Takahiro; Harukawa, Ryota; Sah, Kaushik; Cross, Andrew; Bayana, Hareen; D'Urzo, Lucia; Gronheid, Roel (2016)

Inspection of directed self assembly defects

Ito, Chikashi; Durant, Stephane; Lange, Steve; Harukawa, Ryota; Miyagi, Takemasa; Nagaswami, Venkat; Rincon Delgadillo, Paulina; Gronheid, Roel; Nealey, Paul (2014)

Quantitative pattern collapse metrology for 193nm immersion lithography

Winroth, Gustaf; Gronheid, Roel; Lin, Chua; Neishi, Katsumi; Harukawa, Ryota; Marcuccilli, Gino (2011)