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DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec
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2030 since deposited on 2021-10-23
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Acq. date: 2025-10-25
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2030 since deposited on 2021-10-23
461item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations