Publication:

DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec

Date

2016

Proceedings Paper

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Files

33036.pdf 1.08 MB

Author(s)

Pathangi Sriraman, Hari

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Vandenbroeck, Nadia

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Durairaj, Baskaran

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Somervell, Mark

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Kitano, Takahiro

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Harukawa, Ryota

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2041 since deposited on 2021-10-23

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Acq. date: 2026-04-25