Publication:

DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec

Date

2016
Proceedings Paper
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Author(s)

Pathangi Sriraman, Hari
;
Vaid, Varun
;
Chan, BT  
;
Vandenbroeck, Nadia  
;
Li, Jin
;
Hong, Sung Eun
;
Cao, Yi
;
Durairaj, Baskaran
;
Lin, Guanyang
;
Somervell, Mark
;
Kitano, Takahiro
;
Harukawa, Ryota
;
Sah, Kaushik  
;
Cross, Andrew  
;
Bayana, Hareen  
;
D'Urzo, Lucia  
;
Gronheid, Roel  

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