Publication:

DSA materials contributions to the defectivity performance of the 14nm half-pitch LiNe flow @ imec

Date

2016

Proceedings Paper

Simple item page Full metadata Statistics

Files

33036.pdf 1.08 MB

Author(s)

Pathangi Sriraman, Hari

;

;

;

Vandenbroeck, Nadia

;

;

;

;

Durairaj, Baskaran

;

;

Somervell, Mark

;

Kitano, Takahiro

;

Harukawa, Ryota

;

;

;

;

;

Statistics

2037 since deposited on 2021-10-23

1last month

Acq. date: 2026-01-26