Browsing by author "Goethals, Frederik"
Now showing items 1-3 of 3
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A new procedure to seal the pores of mesoporous low-k films with precondensed organosilica oligomers
Goethals, Frederik; Baklanov, Mikhaïl; Ciofi, Ivan; Detavernier, Christophe; Van Der Voort, Pascal; Van Driessche, Isabel (2012) -
Pore sealing of high porosity mesoporous silica films by self-assembled carbon-bridged organosilicas
Goethals, Frederik; Baklanov, Mikhaïl; Van der Voort, Pascal; Van Driessche, Isabel (2012) -
Ultra low-k cyclic carbon-bridged PMO films with a high chemical resistance
Goethals, Frederik; Ciofi, Ivan; Madia, Oreste; Vanstreels, Kris; Baklanov, Mikhaïl; Detavernier, Christophe; Van Der Voort, Pascal; Van Driessche, Isabel (2012)