Ultra low-k cyclic carbon-bridged PMO films with a high chemical resistance

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Authors

Goethals, Frederik; Ciofi, Ivan; Madia, Oreste; Vanstreels, Kris; Baklanov, Mikhaïl; Detavernier, Christophe; Van Der Voort, Pascal; Van Driessche, Isabel

ISSN

0959-9428

Issue

17

Journal

Journal of Materials Chemistry

Volume

22

Title

Ultra low-k cyclic carbon-bridged PMO films with a high chemical resistance

Publication type

Journal article

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