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Ultra low-k cyclic carbon-bridged PMO films with a high chemical resistance
Publication:
Ultra low-k cyclic carbon-bridged PMO films with a high chemical resistance
Date
2012
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Goethals, Frederik
;
Ciofi, Ivan
;
Madia, Oreste
;
Vanstreels, Kris
;
Baklanov, Mikhaïl
;
Detavernier, Christophe
;
Van Der Voort, Pascal
;
Van Driessche, Isabel
Journal
Journal of Materials Chemistry
Abstract
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1995
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations
Metrics
Views
1995
since deposited on 2021-10-20
Acq. date: 2025-10-23
Citations