Browsing by author "Jozef, Peeters"
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Ozone based atomic layer deposition of metal oxides: impact of N2/O2 supply ratio in ozone generation
Delabie, Annelies; Caymax, Matty; Gielis, Sven; Maes, Jan; Nyns, Laura; Popovici, Mihaela Ioana; Swerts, Johan; Tielens, Hilde; Jozef, Peeters; Van Elshocht, Sven (2010) -
Ozone-based metal oxide atomic layer deposition: impact of N2/O2 supply ratio in ozone generation
Delabie, Annelies; Caymax, Matty; Gielis, Sven; Maes, Jan; Nyns, Laura; Popovici, Mihaela Ioana; Swerts, Johan; Tielens, Hilde; Jozef, Peeters; Van Elshocht, Sven (2010)