Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Conference contributions
View item
imec Publications Repository
imec Publications
Conference contributions
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Ozone based atomic layer deposition of metal oxides: impact of N2/O2 supply ratio in ozone generation
Metadata
Show full item record
Authors
Delabie, Annelies
;
Caymax, Matty
;
Gielis, Sven
;
Maes, Jan
;
Nyns, Laura
;
Popovici, Mihaela Ioana
;
Swerts, Johan
;
Tielens, Hilde
;
Jozef, Peeters
;
Van Elshocht, Sven
Conference
10th International Conference on Atomic Layer Deposition - AVS-ALD
Title
Ozone based atomic layer deposition of metal oxides: impact of N2/O2 supply ratio in ozone generation
Publication type
Meeting abstract
Collections
Conference contributions
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login