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Ozone based atomic layer deposition of metal oxides: impact of N2/O2 supply ratio in ozone generation
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1928 since deposited on 2021-10-18
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Acq. date: 2025-12-11
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Views
1928 since deposited on 2021-10-18
2last month
2last week
Acq. date: 2025-12-11
Citations