Publication:

Ozone based atomic layer deposition of metal oxides: impact of N2/O2 supply ratio in ozone generation

Date

2010
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Author(s)

Delabie, Annelies  
;
Caymax, Matty  
;
Gielis, Sven
;
Maes, Jan  
;
Nyns, Laura  
;
Popovici, Mihaela Ioana  
;
Swerts, Johan  
;
Tielens, Hilde  
;
Jozef, Peeters
;
Van Elshocht, Sven  

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