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Ozone based atomic layer deposition of metal oxides: impact of N2/O2 supply ratio in ozone generation

Date

2010
Meeting abstract
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dc.contributor.authorDelabie, Annelies
dc.contributor.authorCaymax, Matty
dc.contributor.authorGielis, Sven
dc.contributor.authorMaes, Jan
dc.contributor.authorNyns, Laura
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorTielens, Hilde
dc.contributor.authorJozef, Peeters
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-18T15:58:32Z
dc.date.available2021-10-18T15:58:32Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17002
dc.source.conference10th International Conference on Atomic Layer Deposition - AVS-ALD
dc.source.conferencedate20/06/2010
dc.source.conferencelocationSeoul Korea
dc.title

Ozone based atomic layer deposition of metal oxides: impact of N2/O2 supply ratio in ozone generation

dc.typeMeeting abstract
dspace.entity.typePublication
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