Browsing by author "Rangarajan, Srinivasan"
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Plasma halogenated amorphous carbon as growth inhibiting layer for area-selective deposition of titanium oxide
Krishtab, Mikhail; Hung, Joey; Koret, Roy; Turovets, Igor; Shah, Kavita; Rangarajan, Srinivasan; Warad, Laxmi; Zhang, Vanessa; Ameloot, Rob; Armini, Silvia (2020)