Authors

Krishtab, Mikhail; Hung, Joey; Koret, Roy; Turovets, Igor; Shah, Kavita; Rangarajan, Srinivasan; Warad, Laxmi; Zhang, Vanessa; Ameloot, Rob; Armini, Silvia

Conference

Metrology, Inspection, and Process Control for Microlithography XXXIV

Title

Plasma halogenated amorphous carbon as growth inhibiting layer for area-selective deposition of titanium oxide

Publication type

Proceedings paper

Embargo date

9999-12-31