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Plasma halogenated amorphous carbon as growth inhibiting layer for area-selective deposition of titanium oxide
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1993 since deposited on 2021-10-28
1last month
Acq. date: 2026-01-11
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Metrics
Views
1993 since deposited on 2021-10-28
1last month
Acq. date: 2026-01-11
Citations