Browsing by author "Van Bel, Julie"
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Material and process optimization for EUV pattern rectification by DSA
Verstraete, Lander; Suh, Hyo Seon; Van Bel, Julie; Bak, Byeong-U; Kim, Seong Eun; Vallat, Remi; Bezard, Philippe; Beggiato, Matteo; Beral, Christophe (2024)