Browsing by author "Felch, Susan"
Now showing items 1-3 of 3
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Advanced USJ for high-k / metal gate CMOS devices
Absil, Philippe; Ortolland, Claude; Aoulaiche, Marc; Rosseel, Erik; Verheyen, Peter; Vrancken, Christa; Horiguchi, Naoto; Noda, Tajii; Felch, Susan; Schreutelkamp, Rob; Hoffmann, Thomas Y. (2008) -
Manufacturable processes for =32-nm-node CMOS enhancement by synchronous optimization of strain-engineered channel and external parasitic resistances
Noori, Atif; Balseanu, Mihaela; Boelen, Pieter; Cockburn, Andrew; Demuynck, Steven; Felch, Susan; Gandikota, Srinivas; Gelatos, jerry; Khandelwal, Amit; Kittl, Jorge; Lauwers, Anne; Lee, Wen-Chin; Lei, Jianxin; Mandrekar, Tushar; Schreutelkamp, Rob; Shah, Kavita; Thompson, Scott; Verheyen, Peter; Wang, Ching-Ya; Xia, Li-Qun; Arghavani, Reza (2008) -
Performance enhancement of PFET planar devices by plasma immersion ion implantation (P3i)
Ortolland, Claude; Horiguchi, Naoto; Kerner, Christoph; Chiarella, Thomas; Eyben, Pierre; Everaert, Jean-Luc; Agua Borniquel, Jose; Poon, Tse; Santhanam, Kartik; Porshnev, Peter; Foad, Majeed; Schreutelkamp, Robert; Absil, Philippe; Vandervorst, Wilfried; Felch, Susan; Hoffmann, Thomas Y. (2008)