Browsing by author "De Backker, Kris"
Now showing items 1-2 of 2
-
From SPC to APC at IMEC's pilot line: modeling the thermal oxide growth using multiple regression analysis
Catana, Gabriela; De Backker, Kris (2003-10) -
Managing and controlling contamination in an advanced 8" CMOS pilot line
De Backker, Kris; Deweerd, Wim; Lebon, Hans (2001)