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Conference contributions
Managing and controlling contamination in an advanced 8" CMOS pilot line
Publication:
Managing and controlling contamination in an advanced 8" CMOS pilot line
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Date
2001
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Backker, Kris
;
Deweerd, Wim
;
Lebon, Hans
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1961
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
1961
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-10
Citations