Browsing by author "Yoo, Yong-Min"
Now showing items 1-2 of 2
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Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
Beynet, Julien; Wong, Patrick; Miller, Andy; Locorotondo, Sabrina; Vangoidsenhoven, Diziana; Yoon, Tae-Ho; Demand, Marc; Park, Hyung-Sang; Vandeweyer, Tom; Sprey, Hessel; Yoo, Yong-Min; Maenhoudt, Mireille (2009) -
Plasma enhanced atomic layer deposition of silicon oxide for through silicon via
Kwon, Hak-Yong; Kim, Jeon-Ho; Kim, Young-Hoon; Kim, Young-Jae; Kim, Dae-Youn; Choi, Seung-Woo; Park, Hyung-Sang; Yoo, Yong-Min; Thangaraju, Sarasvathi; Redolfi, Augusto; Travaly, Youssef; Swinnen, Bart; Beynet, Julien (2010)