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Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
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1974 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-12
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Metrics
Views
1974 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-12
Citations