Publication:
Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1976 since deposited on 2021-10-17
2last month
Acq. date: 2026-01-10
Citations
Metrics
Views
1976 since deposited on 2021-10-17
2last month
Acq. date: 2026-01-10
Citations