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Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
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Authors
Beynet, Julien
;
Wong, Patrick
;
Miller, Andy
;
Locorotondo, Sabrina
;
Vangoidsenhoven, Diziana
;
Yoon, Tae-Ho
;
Demand, Marc
;
Park, Hyung-Sang
;
Vandeweyer, Tom
;
Sprey, Hessel
;
Yoo, Yong-Min
;
Maenhoudt, Mireille
Conference
SPIE Lithography Asia Taiwan
Title
Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
Publication type
Proceedings paper
Embargo date
9999-12-31
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