Publication:
Low temperature plasma-enhanced ALD enables cost-effective spacer defined double patterning (SDDP)
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1982 since deposited on 2021-10-17
1last month
Acq. date: 2026-05-19
Citations
Statistics
Views
1982 since deposited on 2021-10-17
1last month
Acq. date: 2026-05-19
Citations