Browsing by author "Bersani, M."

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TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

Barozzi, Mario; Iacob, E; van den Berg, J.A.; Reading, M.A.; Adelmann, Christoph; Popovici, Mihaela Ioana; Tielens, Hilde; Bersani, M. (2011)