TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

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Authors
Barozzi, Mario; Iacob, E; van den Berg, J.A.; Reading, M.A.; Adelmann, Christoph; Popovici, Mihaela Ioana; Tielens, Hilde; Bersani, M.
Conference
18th International Conference on Secondary Ion Mass Spectrometry - SIMS XVIII
Title
TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM
Publication type
Meeting abstract
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