Publication:

TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

Date

2011

Meeting abstract

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Author(s)

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van den Berg, J.A.

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Adelmann, Christoph

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Popovici, Mihaela Ioana

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Metrics

1910 since deposited on 2021-10-19

Acq. date: 2026-01-09