Publication:
TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM
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1910 since deposited on 2021-10-19
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Acq. date: 2025-10-25
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Views
1910 since deposited on 2021-10-19
408item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations