Browsing by author "Crook, Kath"

Now showing items 1-2 of 2

Direct Bonding Using Low Temperature SiCN Dielectrics

Iacovo, Serena; Nagano, Fuya; Channam, Venkat Sunil Kumar; Walsby, Edward; Crook, Kath; Buchanan, Keith; Jourdain, Anne; Vanstreels, Kris; Phommahaxay, Alain; Beyne, Eric (2022)
Impact of backside processing on C-V characteristics of TSV capacitors in 3D stacked IC process flows

De Vos, Joeri; Stucchi, Michele; Jourdain, Anne; Beyne, Eric; Patel, Jash; Crook, Kath; Carruthers, Mark; Hopkins, Janet; Ashraf, Huma (2015)