Browsing by author "Terry, J. G."

Now showing items 1-2 of 2

Analysis of the performance of a micromechanical test structure to measure stress in thick electroplated metal films

Smith, S.; Brockie, N. L.; Murray, J.; Wilson, Chris; Horsfall, A. B.; Terry, J. G.; Stevenson, J. T. M.; Mount, A. R.; Walton, A. J. (2010)
Fabrication of test structures to monitor stress in SU-8 films used for MEMS applications

Smith, S.; Brockie, N. L.; Murray, J.; Wilson, Chris; Horsfall, A. B.; Terry, J. G.; Stevenson, J. T. M.; Mount, A.; Walton, A. J. (2010)