Fabrication of test structures to monitor stress in SU-8 films used for MEMS applications

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Authors
Smith, S.; Brockie, N. L.; Murray, J.; Wilson, Chris; Horsfall, A. B.; Terry, J. G.; Stevenson, J. T. M.; Mount, A.; Walton, A. J.
Conference
IEEE International Conference on Microelectronic Test Structures - ICMTS
Title
Fabrication of test structures to monitor stress in SU-8 films used for MEMS applications
Publication type
Proceedings paper
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