Publication:
Fabrication of test structures to monitor stress in SU-8 films used for MEMS applications
Date
| dc.contributor.author | Smith, S. | |
| dc.contributor.author | Brockie, N. L. | |
| dc.contributor.author | Murray, J. | |
| dc.contributor.author | Wilson, Chris | |
| dc.contributor.author | Horsfall, A. B. | |
| dc.contributor.author | Terry, J. G. | |
| dc.contributor.author | Stevenson, J. T. M. | |
| dc.contributor.author | Mount, A. | |
| dc.contributor.author | Walton, A. J. | |
| dc.contributor.imecauthor | Wilson, Chris | |
| dc.date.accessioned | 2021-10-18T21:43:53Z | |
| dc.date.available | 2021-10-18T21:43:53Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18006 | |
| dc.source.beginpage | 8 | |
| dc.source.conference | IEEE International Conference on Microelectronic Test Structures - ICMTS | |
| dc.source.conferencedate | 22/03/2010 | |
| dc.source.conferencelocation | Hiroshima Japan | |
| dc.source.endpage | 13 | |
| dc.title | Fabrication of test structures to monitor stress in SU-8 films used for MEMS applications | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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