Browsing by author "Fujimura, Makoto"
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Development on main chain scission resists for high-NA EUV lithography
Shirotori, Akihide; Hoshino, Manabu; Fujimura, Makoto; Yeh, Sin Fu; Suh, Hyo Seon; De Simone, Danilo; Vandenberghe, Geert; Sanuki, Hideaki (2023)