Browsing by author "Socha, Robert"
Now showing items 1-6 of 6
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Experimental verification of source-mask optimization and freeform illumination for 22 nm node SRAM cells
Bekaert, Joost; Laenens, Bart; Verhaegen, Staf; Van Look, Lieve; Trivkovic, Darko; Lazzarino, Frederic; Vandenberghe, Geert; Van Adrichem, Paul; Socha, Robert; Hsu, Stephen; Liu, Hua Yu; Mouraille, Orion; Schreel, Koen; Dusa, Mircea; Zimmermann, Joerg; Gräupner, Paul; Neumann, Jens Timo (2011-03) -
Freeform illumination sources: an experimental study of source-mask optimization for 22nm SRAM cells
Bekaert, Joost; Laenens, Bart; Verhaegen, Staf; Van Look, Lieve; Trivkovic, Darko; Lazzarino, Frederic; Vandenberghe, Geert; Van Adrichem, Paul; Socha, Robert; Baron, S.; Tsai, M.-C.; Ning, K.; Hsu, S.; Liu, H.Y.; Mulder, M.; Bouma, A.; van der Heijden, E.; Mouraille, O.; Schreel, K.; Finders, Jo; Dusa, Mircea; Zimmerman, J.; Graeupner, Paul; Neumann, J.T.; Hennerkes, C. (2010) -
Freeform illumination sources: Source mask optimization for 22 nm node SRAM
Bekaert, Joost; Laenens, Bart; Verhaegen, Staf; Van Look, Lieve; Trivkovic, Darko; Lazzarino, Frederic; Vandenberghe, Geert; Van Adrichem, Paul; Socha, Robert; Mulder, M.; Baron, Stanislas; Tsai, Min-Chun; Ning, Kai; Hsu, Stephen; Bouma, A.; van der Heijden, E.; Schreel, Koen; Carpaij, R.; Dusa, Mircea; Zimmerman, Joerg; Graeupner, Paul; Hennerkes, Christoph (2009) -
Performance of FlexRay, a fully programmable illumination system for generation of freeform sources on high NA immersion systems
Mulder, Melchior; Engelen, Andre; Noordman, Oscar; Streutker, Gert; van Drieenhuizen, Bert; van Nuenen, Cas; Endendijk, Wilfred; Verbeeck, Jef; Bouman, Wim; Bouma, Anita; Kazinczi, Robert; Socha, Robert; Juergens, Dirk; Zimmermann, Joerg; Trauter, Bastian; Bekaert, Joost; Laenens, Bart; Corliss, Daniel; McIntyre, Greg (2010) -
Through pitch low-k1 contact hole imaging with CPL(TM) technology
Wiaux, Vincent; Bekaert, Joost; Ronse, Kurt; Vandenberghe, Geert; Fung Chen, J.; Hsu, Stephen; Van Den Broeke, Douglas; Socha, Robert (2004) -
Through pitch low-k1 contact hole imaging with CPLTM technology
Wiaux, Vincent; Bekaert, Joost; Fung Chen, J.; Hsu, Stephen; Ronse, Kurt; Socha, Robert; Vandenberghe, Geert; Van Den Broeke, Douglas (2004)