Browsing by author "Tarassenko, C."
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Post metal etch polymer removal: an investigation of the cleaning to remove residual of Si-C and Si-F after fluorocarbon plama etch on the silicon surface
Boullart, Werner; Mannaert, Geert; Graham, S.; Tarassenko, C.; Mouche, Laurent (1998) -
Post metal etch polymer removal: an investigation of the cleaning to remove residual of Si-C and Si-F after fluorocarbon plama etch on the silicon surface
Boullart, Werner; Mannaert, Geert; Graham, S.; Tarassenko, C.; Mouche, Laurent (1999)