Browsing by author "Urbanowicz, A."
Now showing items 1-3 of 3
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300mm in-line metrologies for the characterization of ultra-thin layer of 2D materials
Moussa, Alain; Bogdanowicz, Janusz; Groven, Benjamin; Morin, Pierre; Beggiato, Matteo; Saib, Mohamed; Santoro, G.; Abramovitz, Y.; Houchens, K.; Ben Nissim, S.; Meir, N.; Hung, J.; Urbanowicz, A.; Koret, R.; Turovets, I.; Lorusso, Gian; Charley, Anne-Laure (2023) -
Near-interfacial thermal donor generation during processing of (100)Si/low-k Si-oxycarbide insulator structures revealed by electron spin resonance
Stesmans, Andre; Iacovo, S.; Afanasiev, Valeri; Baklanov, Mikhaïl; Urbanowicz, A. (2014) -
Plasma processing of low-k dielectrics
Baklanov, Mikhaïl; de Marneffe, Jean-Francois; Shamiryan, D.; Urbanowicz, A.; Shi, H.; Rakhimova, T.V.; Huang, H.; Ho, P.S. (2013)