Authors

Stesmans, Andre; Iacovo, S.; Afanasiev, Valeri; Baklanov, Mikhaïl; Urbanowicz, A.

ISSN

0268-1242

Issue

9

Journal

Semiconductor Science and Technology

Volume

29

Title

Near-interfacial thermal donor generation during processing of (100)Si/low-k Si-oxycarbide insulator structures revealed by electron spin resonance

Publication type

Journal article