Publication:
Near-interfacial thermal donor generation during processing of (100)Si/low-k Si-oxycarbide insulator structures revealed by electron spin resonance
Date
| dc.contributor.author | Stesmans, Andre | |
| dc.contributor.author | Iacovo, S. | |
| dc.contributor.author | Afanasiev, Valeri | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Urbanowicz, A. | |
| dc.contributor.imecauthor | Stesmans, Andre | |
| dc.contributor.imecauthor | Afanasiev, Valeri | |
| dc.date.accessioned | 2021-10-22T06:08:46Z | |
| dc.date.available | 2021-10-22T06:08:46Z | |
| dc.date.issued | 2014 | |
| dc.identifier.issn | 0268-1242 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24563 | |
| dc.identifier.url | http://iopscience.iop.org/0268-1242/29/9/095008/article | |
| dc.source.beginpage | 955008 | |
| dc.source.issue | 9 | |
| dc.source.journal | Semiconductor Science and Technology | |
| dc.source.volume | 29 | |
| dc.title | Near-interfacial thermal donor generation during processing of (100)Si/low-k Si-oxycarbide insulator structures revealed by electron spin resonance | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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