Browsing by author "Tuominen, M."
Now showing items 1-3 of 3
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Island growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy
Puurunen, Riikka; Vandervorst, Wilfried; Besling, Wim F. A.; Richard, Olivier; Bender, Hugo; Conard, Thierry; Zhao, Chao; Delabie, Annelies; Caymax, Matty; De Gendt, Stefan; Heyns, Marc; Viitanen, M.M.; De Ridder, M.; Brongersma, Hidde; Tamminga, Y.; Dao, T.; de Win, T.; Verheijen, M.; Kaiser, M.; Tuominen, M. (2004) -
Sr-Cp precursor based ALD SrTiO3 for capacitor applications
Maes, Jan; Blomberg, T.; Matero, R.; Tuominen, M.; Swerts, Johan; Menou, Nicolas; Wang, Xin Peng; Kittl, Jorge; Wouters, Dirk (2008) -
Surface preparation and interfacial stability of high-k dielectrics deposited by atomic layer chemical vapor deposition
Tsai, Wilman; Carter, Richard; Nohira, Hiroshi; Caymax, Matty; Conard, Thierry; Cosnier, Vincent; De Gendt, Stefan; Heyns, Marc; Petry, Jasmine; Richard, Olivier; Vandervorst, Wilfried; Young, Edward; Zhao, Chao; Maes, Jan; Tuominen, M.; Schulte, W.H.; Garfunkel, E.; Gustafsson, T. (2003)