Sr-Cp precursor based ALD SrTiO3 for capacitor applications

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Authors
Maes, Jan; Blomberg, T.; Matero, R.; Tuominen, M.; Swerts, Johan; Menou, Nicolas; Wang, Xin Peng; Kittl, Jorge; Wouters, Dirk
Conference
8th International Conference on Atomic Layer Deposition - ALD
Title
Sr-Cp precursor based ALD SrTiO3 for capacitor applications
Publication type
Proceedings paper
Embargo date
9999-12-31
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