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Conference contributions
Sr-Cp precursor based ALD SrTiO3 for capacitor applications
Publication:
Sr-Cp precursor based ALD SrTiO3 for capacitor applications
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Date
2008
Proceedings Paper
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17967.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Maes, Jan
;
Blomberg, T.
;
Matero, R.
;
Tuominen, M.
;
Swerts, Johan
;
Menou, Nicolas
;
Wang, Xin Peng
;
Kittl, Jorge
;
Wouters, Dirk
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1970
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-11
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Views
1970
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-11
Citations