Publication:
Island growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy
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2062 since deposited on 2021-10-15
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Acq. date: 2026-09-11
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Statistics
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2062 since deposited on 2021-10-15
2last month
2last week
Acq. date: 2026-09-11
Citations