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Island growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy
Publication:
Island growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy
Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Puurunen, Riikka
;
Vandervorst, Wilfried
;
Besling, Wim F. A.
;
Richard, Olivier
;
Bender, Hugo
;
Conard, Thierry
;
Zhao, Chao
;
Delabie, Annelies
;
Caymax, Matty
;
De Gendt, Stefan
;
Heyns, Marc
;
Viitanen, M.M.
;
De Ridder, M.
;
Brongersma, Hidde
;
Tamminga, Y.
;
Dao, T.
;
de Win, T.
;
Verheijen, M.
;
Kaiser, M.
;
Tuominen, M.
Journal
Journal of Applied Physics
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2048
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
2048
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations