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Island growth in the atomic layer deposition of zirconium oxide and aluminium oxide on hydrogen-terminated silicon: growth mode modelling and transmission electron microscopy
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2052 since deposited on 2021-10-15
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Acq. date: 2026-01-08
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2052 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-01-08
Citations