Browsing by author "Furuhashi, Takahisa"

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Characterization of Impact of Vertical Stress on FinFETs

Furuhashi, Takahisa; Haneda, Masaki; Sasaki, Toru; Kagawa, Yoshihisa; Ooka, Yutaka; Hirano, Tomoyuki; Ohno, Keiichi; Iwamoto, Hayato; Saito, Masaki; Liu, Yefan; Hiblot, Gaspard; Vanstreels, Kris; Gonzalez, Mario; Velenis, Dimitrios; Beyer, Gerald; Van der Plas, Geert; De Wolf, Ingrid; Beyne, Eric (2019)
Study of out-of-plane mechanical stress impact on Si BJT and diffusion resistor using in-situ nanoindentation probing

Liu, Yefan; Hiblot, Gaspard; Furuhashi, Takahisa; Lin, Hesheng; Velenis, Dimitrios; De Wolf, Ingrid (2019)