Characterization of Impact of Vertical Stress on FinFETs

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Authors
Furuhashi, Takahisa; Haneda, Masaki; Sasaki, Toru; Kagawa, Yoshihisa; Ooka, Yutaka; Hirano, Tomoyuki; Ohno, Keiichi; Iwamoto, Hayato; Saito, Masaki; Liu, Yefan; Hiblot, Gaspard; Vanstreels, Kris; Gonzalez, Mario; Velenis, Dimitrios; Beyer, Gerald; Van der Plas, Geert; De Wolf, Ingrid; Beyne, Eric
Conference
2019 22nd European Microelectronics and Packaging Conference & Exhibition (EMPC)
Title
Characterization of Impact of Vertical Stress on FinFETs
Publication type
Meeting abstract
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