Publication:

Characterization of Impact of Vertical Stress on FinFETs

Date

2019

Meeting abstract

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Author(s)

Furuhashi, Takahisa

;

;

;

Kagawa, Yoshihisa

;

;

Hirano, Tomoyuki

;

;

Iwamoto, Hayato

;

;

;

Hiblot, Gaspard

;

Vanstreels, Kris

;

Gonzalez, Mario

;

Velenis, Dimitrios

;

;

Van der Plas, Geert

;

De Wolf, Ingrid

;

Statistics

1963 since deposited on 2021-10-27

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Acq. date: 2026-04-26