Authors

Liu, Yefan; Hiblot, Gaspard; Furuhashi, Takahisa; Lin, Hesheng; Velenis, Dimitrios; De Wolf, Ingrid

ISSN

0026-2714

Journal

Microelectronics Reliability

Volume

100-101

Title

Study of out-of-plane mechanical stress impact on Si BJT and diffusion resistor using in-situ nanoindentation probing

Publication type

Journal article