Browsing by author "Cubaynes, F.N."

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Further optimization of plasma nitridation of ultra-thin oxides for 65-nm node MOSFETS

Kraus, P.A.; Chua, T.C.; Ahmed, K.Z.; Campbell, J.; Nouri, F.; Cruise, J.; Rothschild, Aude; Veloso, Anabela; Mertens, Sofie; Schaekers, Marc; Cubaynes, F.N.; Date, Lucien; Schreutelkamp, Rob; Bauer, T.M. (2004)
Plasma-nitrided silicon-rich oxide as an extension to ultrathin nitrided oxide gate dielectrics

Cubaynes, F.N.; Venezia, V.C.; van der marel, C.; Snijders, J.H.M.; Everaert, Jean-Luc; Shi, Xiaoping; Rothschild, Aude; Schaekers, Marc (2005)