Browsing by author "Copel, M."
Now showing items 1-3 of 3
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Characterization of high-k films grown by atomic layer deposition
Vandervorst, Wilfried; Conard, Thierry; Petry, Jasmine; Brijs, Bert; Bender, Hugo; Richard, Olivier; Caymax, Matty; De Gendt, Stefan; Green, Martin; Cartier, Eduard; Copel, M. (2002) -
Physical and electrical properties of reactive molecular-beam-deposited aluminum nitride in metal-oxide-silicon structures
Ragnarsson, Lars-Ake; Bojarczuk, N.A.; Copel, M.; Gusev, E.P.; Karasinski, J.; Guha, S. (2003) -
Thermal stability and scalability of zr-aluminate-based high-k gate stacks
Chen, Jerry; Cartier, Eduard; Carter, Richard; Kauerauf, Thomas; Zhao, Chao; Pétry, Jasmine; Cosnier, Vincent; Xu, Zhen; Kerber, Andreas; Tsai, Wilman; Young, Edward; Kubicek, Stefan; Caymax, Matty; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Copel, M.; Besling, Wim; Bajolet, Philippe; Maes, Jan (2002)