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Characterization of high-k films grown by atomic layer deposition
Publication:
Characterization of high-k films grown by atomic layer deposition
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Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Conard, Thierry
;
Petry, Jasmine
;
Brijs, Bert
;
Bender, Hugo
;
Richard, Olivier
;
Caymax, Matty
;
De Gendt, Stefan
;
Green, Martin
;
Cartier, Eduard
;
Copel, M.
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1947
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-10
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Metrics
Views
1947
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-10
Citations