Publication:
Characterization of high-k films grown by atomic layer deposition
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1953 since deposited on 2021-10-14
6last month
2last week
Acq. date: 2026-01-09
Citations
Metrics
Views
1953 since deposited on 2021-10-14
6last month
2last week
Acq. date: 2026-01-09
Citations