Browsing by author "Watso, Robert"
Now showing items 1-3 of 3
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Litho and patterning challenges for memory and logic applications at the 22nm node
Finders, Jo; Dusa, Mircea; Nikolsky, Peter; Van Dommelen, Youri; Watso, Robert; Vandeweyer, Tom; Bekaert, Joost; Laenens, Bart; Van Look, Lieve (2010) -
Optical path and image performane monitoring of a full-field 157-nm scanner
Wells, Greg; Hermans, Jan; Watso, Robert; Kang, Young-Seog; Morton, Rob; Kocsis, Michael; Okoroanyanwu, Uzo; De Bisschop, Peter; Stepanenko, Nickolay; Ronse, Kurt (2004) -
Status and critical challenges for 157nm lithography
Ronse, Kurt; De Bisschop, Peter; Goethals, Mieke; Hermans, Jan; Jonckheere, Rik; Light, Scott; Okoroanyanwu, Uzo; Watso, Robert; McAfferty, D.; Ivaldi, J.; Oneil, T.; Sewell, H. (2004)