Litho and patterning challenges for memory and logic applications at the 22nm node

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Authors
Finders, Jo; Dusa, Mircea; Nikolsky, Peter; Van Dommelen, Youri; Watso, Robert; Vandeweyer, Tom; Bekaert, Joost; Laenens, Bart; Van Look, Lieve
Conference
Optical Microlithography XXIII
Title
Litho and patterning challenges for memory and logic applications at the 22nm node
Publication type
Proceedings paper
Embargo date
9999-12-31
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