Browsing by author "Donaton, R."

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Advanced solutions for copper and low k technology

Beyer, Gerald; Baklanov, Mikhaïl; Brongersma, Sywert; De Roest, David; Donaton, R.; Grillaert, Joost; Lanckmans, Filip; Maenhoudt, Mireille; Maex, Karen; Richard, Emmanuel; Struyf, Herbert; Stucchi, Michele; Tokei, Zsolt; Van Hove, Marleen; Vervoort, Iwan (2000)
The influence of Ti capping layers on CoSi2 formation

Detavernier, C.; Donaton, R.; Maex, Karen; Van Meirhaeghe, R.; Cardon, F. (1999)